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Cleaning Equipment, High-pressure Cleaner, Industrial Machinery
Highly Concentrated Ozone Water Cleaning System AURORA – HUG Power Co. Ltd.
Cleaning Equipment, High-pressure Cleaner, Industrial MachineryHighly Concentrated Ozone Water Cleaning System AURORA – HUG Power Co. Ltd.
resist stripping system
AURORA is a resist stripping system that can strip resist after ion implantation at low temperatures. By combining plasma treatment (removal of hardened layer) and ozonated water treatment (resist removal), it can remove resist without leaving any residue, and can also remove resist without damaging the underlying film (such as Si, SiO2, etc.). Furthermore, running costs and the number of processes are reduced by eliminating chemicals such as sulfuric acid permeate and ammonia permeate. High throughput can be achieved due to its fast removal rate (2 to 4 μm/min).
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