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UV Laser Cleaner – Kokyo Inc.


UV lasers have high photon energy and cause photolysis processing, in which molecular bonds are directly dissociated on the irradiated surface.

Compared to thermal decomposition processing, this product has a sharper finish with less stain residue on the surface and minimizes damage to the base material.
In particular, the use of a UV laser can effectively remove stains from organic materials (oil, resist, etc.) on inorganic materials and materials that are easily decomposed by UV light.
In addition, by focusing the objective lens through the galvanometer scanner, it is possible to form a fine spot diameter of several micrometers or less for pinpoint and limited cleaning.
By removing the objective lens unit, it is possible to clean an area up to 300 mm square.

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Features

  • Photo-degradation process reduces damage to base materials and dirt residue.
  • Micro and wide area cleaning by lens selection
  • Small beam spot size near diffraction limit of 0.48 µm (with NA 0.9 objective lens)
  • High speed galvano scanner marking without the need for a motorized stage
  • Real-time monitoring on PC screen

Applications

  • Removal of organic matter (oil, resist, etc.) on metals, semiconductors, inorganic materials, organic insulating films, removal of material stains after UV degradation, etc.

processing sample

Composition

  • UV laser oscillator
  • Galvano scanner mirror
  • Objective lens unit for ultrafine detail
  • Cooling chiller
  • Marking software
  • Monitoring software

Specifications

Laser wavelength 355 nm
Spot diameter 0.48 μm (with NA 0.9 objective lens)

Option

Optional item when objective lens unit for ultra-fine is mounted

  • 4x objective lens with NA0.13
  • NA0.3 10x objective lens
  • NA0.5 20x objective lens

Optional item when the objective lens unit for ultrafine objective lens is not mounted

  • f=100 fθ lens
  • f=160 fθ lens
  • f=254 fθ lens
  • f=430 fθ lens

Others

  • Laser safety goggles
  • Other laser safety related products

We can customize UV laser cleaner lenses and peripherals for your application.

We aim to be No. 1 in the laser industry for customer satisfaction.

We continue to provide excellent products and services and pursue customer satisfaction.

Supplier Information

  • Store Name: Kokyo, Inc.
  • Vendor: Kokyo, Inc.
  • Address: 600-8411
    Kyoto Shimogyo-ku No.5 Hase Bldg. 2F, 637, Suiginya-cho
    Karasuma-dori Shijo-sagaru