Steam 2-Fluid Cleaning System BEUGA – HUG Power Co. Ltd.
steam two-fluid cleaning system
BEUGA is a steam-based two-fluid cleaning system with multiple sonic nozzles for gold lift-off and resist stripping. The system does not require expensive chemicals, resulting in cost savings, and in the gold lift-off process, a gold recovery rate of 95% or higher can be achieved. The system only uses pure water as its raw material, reducing the need for chemicals and thus contributing to lower costs and a reduced environmental impact.
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Features
- Cost reduction (chemical reduction)
- Improved gold recovery rate > 95%
- Reduction of environmental impact
Basic Configuration
- Steam generator (SGM) made of stainless steel
- Multiple supersonic steam injection nozzles
- Front End Module (transport system)
- Control System
- Steam, pure water, and gas control system
- Exhaust and drainage system
Specifications
- Wafer diameter: 50-150mmΦ
- Power: Pure water, N2 (for purge), AC200V, 100A x 2
- Steam pressure control range: 0.05-0.2MPa
- Dimensions: 1200 (W) x 1500 (D) x 2200 (H)
Applications/Examples of Actual Results
- Target Applications: Gold lift-off, Resist removal, WAX and oil removal, Foreign matter removal
We will globally develop environmentally friendly technologies based on water, the source of life.
HUG Power Co., Ltd. contributes to the reduction of chemical usage and the global environmental burden through the development, design, and sales of industrial cleaning equipment based on cutting-edge cleaning technology using functional water as its core. With a desire to fundamentally change the cleaning process, which currently uses many harmful chemicals, we will globally promote human- and environment-friendly technologies, mainly steam two-fluid cleaning technology and highly concentrated ozone water cleaning technology.
Supplier Information
- Store Name: HUG Power Co., Ltd.
- Vendor: HUG Power Co., Ltd.
- Address: 226-8501
Kanagawa Yokohama-shi 226-8501 4259 Nagatsutacho
- Cleaning Equipment, High-pressure Cleaner, Industrial Machinery
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