Microfabricated Systems – MEMS – CITIZEN FINEDEVICE CO.LTD.
We provide you with“from trial production to mass production, from molds to components”one-stop service.
MEMS (Micro Electro Mechanical Systems) is a component, which is formed by integrating mechanical parts, sensors, actuators and electronic circuits on a silicon substrate, a glass substrate, an organic material or other materials, using the microfabrication technique.
Due to process limitations or different materials, the mechanical structure and the electronic circuit may use different chips. Such hybrid system is also called MEMS.
Description
How does CITIZEN FINEDEVICE Co.,LTD. think about MEMS?
Since the MEMS processing technology was created, we have had more than 20 years experience and developed sensor MEMS, actuator MEMS and package MEMS.
Along with the above technology development, we have specialized in the micro-machining technology for substrate materials other than Si (ceramics, glass and crystal) continuously, established relevant systems, utilized crystal oscillator manufacturing technology and established wafer manufacturing process. And we provide services from cutting to packaging.
At present, the company is involved in the fields of electronic parts for people’s life, clock parts and medical industry. It realizes the achievement in mass production of medical detection boards, the realization of which is attributed to our proprietary substrate processing technology, and also reflects the advantages of film forming technology.
In addition to our products, we also have the ability to use MEMS technology and micro machining technology to manufacture precision molds.
In terms of trial production and development in the process, we combine the proprietary technologies to provide the best scheme, and as a wafer foundry, we can achieve one-stop production from wafer processing to packaging to meet the requirements of customers.
The history of MEMS
MEMS began with micro machining in the 1960s.
Strain gauges with the piezoresistive effect of monocrystalline silicon applied were developed around 1970 and used as strain sensors.
After that, isotropic and anisotropic silicon wet etching was developed, and it became possible to form physical structures in addition to piezoresistive elements. It has been used as a pressure sensor for automobiles since the latter half of the 1970s. At present, MEMS components are evolving into components with more complex mechanisms, such as acceleration sensors for automobile airbags, inkjet print heads, digital mirror devices and so on.
(Reference: Trends of MEMS Components and the Role of Vacuum Technology /Yasushi Goto, Akira Koide)
Product group with MEMS applied
MEMS was developed in the middle of the 20th century. It has been used for built-in acceleration sensors or gyroscopes in smart phones and other devices since 2000.
Its range of use has been expanded. As a movable semiconductor, MEMS technology is used in a wide range of fields such as vehicles / automatic driving, big data, AI, robotics, health care, environment and energy, and the latest relevant technologies emerge in endlessly.
CFD is realizing a wide range of application-aware product development, such as smart phones upgrades, IoT (Internet of things), automatic driving, VR (virtual reality), AR (augmented reality), 5G communications.
MEMS market
MEMS market includes areas in sensors (inertia, pressure, microphone, environment, optics, etc.), actuators (ink-jet print heads, microfluidic and RF, etc.), automobiles, household appliances, defense, health care, communication, aerospace and others.
The products, the final use of which are oriented to customers, account for 60%. According to the statistics of Yole Développement, a semiconductor market trend research company in France, its market scale was estimated to be US $7.13 billion in 2020.
It is forecast that the market will continue to expand at an average annual rate of 8% in the future, reaching US $11.27 billion in 2026.
The vehicle market ranks second, with the market scale reaching US $2.03 billion in 2020. It is expected to continue to expand at an average annual rate of about 6% in the future, reaching US $2.86 billion in 2026.
The communication infrastructure market, which is expected to grow rapidly in the future, is estimated to grow from US $60 million in 2020 to US $140 million in 2026, with an average annual expansion of about 17%.
Equipment list
| Technology | Devices | Machining dimension | Content for processing | |
| Film forming | Deposition | Deposition devices | ~6 inches | Metal, alloy, oxide film, nitride film, AuSn, special materials, etc |
| Sputtering | Sputtering devices | ~6 inches | Metal, alloy, oxide film, nitride film, special materials, etc | |
| SiO2 film forming | Thermal oxidation furnaces | ~6 inches | SiO2 film formation (~5μm) | |
| TEOS-CVD devices | ~8 inches | SiO2 film formation | ||
| Galvanoformung, electroless galvanoformun | Galvanoformung and electroless galvanoformun devices | ~4 inches | Ni、Cu、Au、SnAg | |
| Printing | Screen printing devices | ~8 inches | Electrode film, water-repellent film, oil-repellent film | |
| Photolithography | Photoresist coating | Spin Coaters | ~6 inches | Photoresist and polyimide coating |
| Coating machines | ~8 inches | photoresist coating | ||
| Laminators | ~6 inches | Dry film lamination | ||
| Baking | Baking ovens | ~6 inches | Photoresist hardening | |
| Hot plates | ~6 inches | Photoresist hardening | ||
| Curing ovens | ~6 inches | Polyimide hardening | ||
| Exposure | Contact aligners | ~6 inches | Pattern formation (processing capacity : larger than 3 μm) | |
| Steppers | ~4 inches | Pattern formation (processing capacity : larger than 1 μm) | ||
| Developing | Puddle developing devices | ~6 inches | Photoresist, polyimide development | |
| Conveyors | ~6 inches | Dry film development | ||
| Dip developing baths | ~6 inches | Photoresist, polyimide, dry film development | ||
| Lift off | Lift-off devices | ~4 inches | Removing photoresist through swelling, shaking and ultrasonic
(processing capacity : larger than 5 μm) |
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| Etching | Dry etching | ICP-RIE devices | ~6 inches | Si etching |
| RIE devices | ~6 inches | Si and SiO2 etching | ||
| Blasting | Blasting devices | ~8 inches | Si, glass and ceramic etching | |
| Ion milling | Ion milling devices | ~4 inches | Metal, SiO2 and Si etching | |
| Laser machining | Laser-beam perforation machines | ~6 inches | Si and ceramic perforation processing | |
| Wet etching | Wet etching baths | ~6 inches | Si, SiO2 and crystal etching | |
| Substrate cutting | Cutting | Blade cutting devices | ~6 inches | Substrate cutting |
| Substrate grinding | Lapping | Lapping devices | ~6 inches | Substrate grinding |
| Polishing | Polishing devices | ~6 inches | Substrate grinding | |
Advancing Technologies with Precision MEMS
CITIZEN FINEDEVICE Co., LTD. pioneers in Micro Electro-Mechanical Systems (MEMS), propelling advancements in IoT, automotive, healthcare, and more. With over 20 years of expertise, we deliver tailor-made MEMS solutions, enabling breakthroughs in diagnostics, smart devices, and autonomous technology.
20Years of Expertise |
Innovative Technologies |
Quality Manufacturing |
We nurture “people” through manufacturing, We create “valuable products” and contribute to a “prosperous future” through manufacturing, and contribute to a “prosperous future”.
We provide a wide variety of products such as small metal parts for automobiles, quartz devices, and ceramic parts to customers in Japan and overseas. We develop high value-added microdevice products with our high-precision crystal microfabrication technology and proprietary core technologies cultivated in the watch business.

Diverse Product Range
Citizen Fine device offers a wide array of products including automotive parts, crystal devices, fine ceramic components, ceramic packages, micro displays, combustion pressure sensors, measuring instruments, factory automation system , and motors. This diverse range meets broad market needs, establishing the company as an industry pioneer.
Unique Core Technologies
With years of experience in precision metal part machining, thin-film technology, brittle material processing, assembly technology, and sealing technology, Citizen Fine device delivers high-quality and innovative products. These technologies are the cornerstone of product differentiation and competitive strength.
In-House Manufacturing Equipment
To maintain unique value, Citizen Finedevice utilizes its own developed manufacturing equipment. This ensures consistent product quality and reliability, maintaining a competitive edge in the market.
MEMS device foundry
Using proprietary technologies, we provide services ranging from design to mass production in terms of products requiring micro machining.
Precision Microfabrication |
Diverse Substrate Processing |
Custom Design and Consultation |
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| Advanced manufacturing of MEMS components using cutting-edge microfabrication technologies. | Expertise in handling a range of substrates, including silicon, glass, crystal, and ceramics. | Tailored design services and expert consultation for specific MEMS applications. |

sensor MEMS, actuator MEMS and package MEMS, microfluidic chips,microwell plates, medical analysis and detection boards
Empowering Your Innovations with Custom MEMS Solutions
Discover the forefront of MEMS technology with CITIZEN FINEDEVICE, a leader in microfabrication solutions. Our expertise spans across critical sectors like IoT, automotive, healthcare, and more, making us ideal for a variety of sophisticated applications.
We specialize in crafting bespoke MEMS components, utilizing substrates ranging from silicon to ceramics with unparalleled precision.
Our journey with you goes beyond mere production; we’re committed to nurturing your project from conceptual design to mass production, ensuring top-tier quality and confidentiality.
CITIZEN FINEDEVICE stands out for its exceptional customization capabilities and comprehensive one-stop services, marrying innovation with efficiency.
Choose us for a partnership that brings your cutting-edge ideas to life with meticulous engineering, cost-effectiveness, and a commitment to pushing the boundaries of technology.
Our Capabilities
Showcasing Our Comprehensive Expertise: A Deep Dive into Our Capabilities for MEMS Production
Design & ConsultationTailored MEMS design and expert consultation to meet all kind of needs. |
MicrofabricationPrecision manufacturing using advanced microfabrication technology. |
Substrate HandlingProcessing various substrates such as silicon, glass, crystal, and ceramics. |
PhotolithographyDetailed pattern formation on substrates for precise and customized MEMS components. |
EtchingServices Advanced dry and wet etching techniques for precise material shaping. |
Metal ProcessingHigh-precision metal part manufacturing with LIGA technology. |
Film FormingCreation of functional films for diverse applications. |
Micro BlastingSpecialized machining for ceramics and glass, ensuring superior precision and quality. |
Production ScalingWe support everything from trial production to mass manufacturing. |
Packaging & BondingAdvanced bonding techniques, including AuSn solder. |
Quality TestingRigorous assurance and testing of MEMS components. |
Post-delivery SupportComprehensive after-sales service and support. |
Process from consultation to mass production

※The above process is only an example. In the actual process, we will discuss with customers in terms of each business, and make decisions based on such discussion. If you have any inquiries, commissions or requests, please fill in the consultation page and contact us.
1.Initial Consultation:
Client engagement for project briefing. Detailed discussion to capture specific MEMS requirements and objectives.
2.Design and Customization:
Development of custom MEMS designs tailored to client specifications. Iterative review process for design approval and modifications.
3.Prototype Development:
Fabrication of initial prototypes based on finalized designs. Comprehensive testing to assess functionality and performance.
4.Feedback and Refinement:
Gathering client feedback on prototype. Implementing design adjustments and refinements for optimization.
5. Prototype:
Transitioning from prototype phase. Preparing production processes for efficiency and quality.
6. Mass Production:
Transitioning to large-scale manufacturing setup. Streamlining production processes for efficiency and quality.
7.Quality Assurance and Testing:
Rigorous quality control measures during mass production. Ensuring consistent quality and adherence to industry standards.
8.Final Product Delivery:
Packaging and dispatching the finished MEMS components. Coordination of logistics for timely delivery.
9.Post-Delivery Support:
Offering technical support and addressing post-delivery inquiries. Ensuring client satisfaction and facilitating future collaboration.
Proprietary technologies of CITIZEN FINEDEVICE Co.,LTD.
What supports products of CITIZEN DEVICE is our unique core technologies that we have built up over the years for Precision turning technology, thin-film technology, brittle material machining technology, assembly technology, and sealing technology.
We apply these core technologies to high value-added products and meet a wide range of needs in the electronic components and medical, bio, clock fields, industry, consumer.


Case Studies

Industry: measurement and analysis device industry
Solution:Customer issues
The substrate used in the original products is Si (sillicon) substrate, which has problems such as high cost and sharpening ofwafer in case of damage. And the measurement points are set as the maximum, with a total of 48 points, which shows the problem of high density of measurement points.
Solution:Products or the content of solutions
Alumina substrate has been developed to replace Si substrate through the company’s proprietary ceramic substrate grinding technology.
Amount
The price should not be disclosed, but it has provided us with services at a low price.
Delivery time
Delivered on time: we are very satisfied.
After delivery:Voice of customers
Perfect after-sales service: we intend to continue to cooperate in the future.
Industry: measurement and analysis device industry
Solution:Customer issues
The standard mold manufacturing method is metal processing, but the price of the cut and molded molds is high (depending on the processing equipment), the precision is not good and the effect is poor.
As long as it takes enough time and money, a sufficient level of molds can also be produced by cutting process, but the cost is too high.
Solution:Products or the content of solutions
CITIZEN FINEDEVICE Co.,LTD. uses semiconductor process (vs machining) to provide silicon and electroplating molds.
It can also provide high-precision molds and multi-layer structure molds with high demands.
Amount
It only needs hundreds of thousands to millions of yen (tens of millions of yen for cutting process) to get the services.
Delivery time
The term of delivery is 1~2months.
After delivery:Voice of customers
Successfully purchased the products of CITIZEN FINEDEVICE Co.,LTD. at the price of less than 1/10 of molds processed by cutting.
CSR Customer Satisfaction Improvement Activities
ISO certification acquisition status

ISO14001:2015

ISO9001:2015

IATF16949
ISO14001 Certification Acquisition Status
| Company Name | Standard | Examining Authority | First registration date |
|---|---|---|---|
| CITIZEN FINEDEVICE Co.,Ltd | ISO14001:2015 JIS Q14001:2015 |
Bureau Veritas Japan Co.,Ltd. | KAWAGUCHIKO 1999.08.21 |
| FUJIMI CORPORATION | ISO14001:2015 JIS Q14001:2015 |
Bureau Veritas Japan Co.,Ltd. | MIYOTA/KITAMIMAKI 1999.10.17 |
| CITIZEN MICRO Co., Ltd. | ISO14001:2015 JIS Q14001:2015 |
Bureau Veritas Japan Co.,Ltd. | 2004.10.25 |
| CITIZEN CHIBA PRECISION Co., Ltd. | ISO14001:2015 JIS Q14001:2015 |
Bureau Veritas Japan Co.,Ltd. | 1999.08.21 |
| Master Crown Electronics (Wuzhou) Ltd. | ISO14001:2015 JIS Q14001:2015 |
China Quality Certification Centre | 2006.03.07 |
| CITIZEN SEIMITSU (THAILAND) CO.,LTD. | ISO14001:2015 | BSI Group (Thailand)Co.,Ltd. | 2017.03.18 |
| CITIZEN FINEDEVICE PHILIPPINES CORP | ISO14001:2015 | Bureau Veritas Philippines Co.,Ltd. | 2018.12.12 |
ISO9001 Certification Acquisition Status
| Company Name | Standard | Examining Authority | First registration date |
|---|---|---|---|
| CITIZEN FINEDEVICE Co.,Ltd | ISO9001:2015 JIS Q9001:2015 |
Bureau Veritas Japan Co.,Ltd. | KAWAGUCHIKO 1997.03.25 MIYOTA/KITAMIMAKI 2005.09.05 |
| CITIZEN MICRO Co., Ltd. | ISO9001:2015 JIS Q9001:2015 |
Bureau Veritas Japan Co.,Ltd. | 1996.10.31 |
| CITIZEN CHIBA PRECISION Co., Ltd. | ISO9001:2015 JIS Q9001:2015 |
Bureau Veritas Japan Co.,Ltd. | 1998.12.03 |
| Master Crown Electronics (Wuzhou) Ltd. | ISO9001:2015 | China Quality Certification Centre | 2004.06.10 |
| CITIZEN FINEDEVICE PHILIPPINES CORP | ISO9001:2015 | Bureau Veritas Philippines Co.,Ltd. | 2018.12.12 |
IATF16949 Certification Acquisition Status
| Company Name | Standard | Examining Authority | First registration date |
|---|---|---|---|
| CITIZEN FINEDEVICE Co.,Ltd FUJIMI CORPORATION |
IATF16949 | Bureau Veritas Japan Co.,Ltd. | TS 2006.02.07 |
| CITIZEN SEIMITSU (THAILAND) CO.,LTD. | IATF16949 | BSI Group (Thailand)Co.,Ltd. | 2016.03.21 |
Citizen Group Responsible Minerals Procurement Policy
In order to fulfill our social responsibilities in the supply chain in cooperation with our business partners, the Citizen Group, as a policy, will not use target minerals*1 that may contribute to any risk of human rights abuses such as child labor or forced labor, environmental destruction, conflicts, terrorist financing, money laundering, corruption, or fraudulent financing—in mining, trading, handling, export, and our other business activities.
It does not mean, however, that any and all minerals mined and traded in conflict areas and high-risk areas should not be used, but that we may use minerals mined and traded in these areas if they are not related to human rights violations, environmental destruction, conflicts, corruption, or other wrongdoings. If a potential target risk*2 is confirmed, we will request the relevant business partners to take corrective actions.
Established: April 2019. Amended: January 2021
*1 Target minerals: 3TG (tantalum, tin, tungsten, gold) and cobalt
*2 Target risks: Risks and environmental destruction under Annex II of the OECD Guidance
CITIZEN Group Environmental policy
Basic Policy
Based on its corporate philosophy of “contributing to and being loved by citizens,” the Citizen Group will contribute to a sustainable civil society where people can live rich in spirit and with peace of mind, by carrying out business activities, while keeping the global environment and people all over the world strongly in mind.
Environmental Action Guidelines
1.We will endeavor to preserve the global environment by reducing adverse environmental impact throughout the life cycle of our products and services and by promoting “environmentally friendly manufacturing” through the development and provision of environmentally friendly products.
2.We will comply with laws, ordinances, regulations, agreements and other requirements regarding the environment.
3.We will endeavor to mitigate and adapt to climate changes by promoting greenhouse gas reduction and energy saving in our business activities.
4.We will endeavor to use resources sustainably by saving resources, reducing waste, conserving water resources, and taking other appropriate actions.
5.We will endeavor to prevent pollution by strengthening the management of chemical substances contained in products or handled at business sites.
6.We will strengthen harmony with local communities by deepening communication with them through such initiatives as participation in environmental conservation activities and in biodiversity and ecosystem protection activities in local communities.
7.We will strengthen the environmental awareness of our employees through education and awareness building activities concerning the environment. We will also actively disclose information on environmental initiatives to fulfill our accountability to the community.
The Citizen Group will establish environmental targets in accordance with this Environmental Policy and work with suppliers, buyers, and other business partners to implement, evaluate, and continuously improve those targets. This Environmental Policy will be made publicly available and communicated to all employees and people working together.
Amended: Dec.2019
Award History
| Year | Customer Name | Award Name | Content |
|---|---|---|---|
| 2024 | Advics Co., Ltd. | Special Award | Recommended by Advics Co., Ltd. as a candidate for the “Aisin Group Quality Excellence Award,” our company was nominated among four companies and was awarded for having the highest evaluation score. |
| 2023 | Aisin Co., Ltd. | Aisin Group Quality Excellence Award | Recommended by Advics Co., Ltd. as a candidate for the “Aisin Group Quality Excellence Award,” our company was nominated among four companies and was awarded for having the highest evaluation score. |
| 2023 | Advics Co., Ltd. | Quality Award | Acknowledged for outstanding achievements in quality performance over the past three years, delivery quantity and stable supply, along with our high processing technology, and overall maintenance management of equipment, and awarded accordingly. |
| 2021 | Denso Corporation | Global Best Supplier Award | Recognized for contributions globally, including quality improvement, cost reduction, and delivery performance, both domestically and internationally, and awarded accordingly. |
| 2020 | Toyota Motor Corporation | Hirose Plant Quality Honor Award | Awarded for the brake parts supplied to Toyota Motor Hirose Plant achieving zero defect deliveries over four years. |
| 2020 | Toyota Motor Corporation | Miyoshi Plant Excellent Quality 5 Year Continuation Award | Awarded for the engine parts supplied to Toyota Motor Miyoshi Plant achieving zero defect deliveries over five years. |
| 2020 | Denso Corporation | Excellent Supplier Award | Recognized and awarded for outstanding achievements in quality, cost, and delivery performance. |
| 2020 | Schaeffler Technologies AG & Co. KG / Continental Automotive GmbH | PREMIUM SUPPLIER NOMINATION 2019 | Acknowledged for outstanding achievements in quality, cost, and delivery performance, and awarded accordingly. |
| 2019 | Toyota Motor Corporation | Hirose Plant Best Quality Award | Awarded for the brake parts supplied to Toyota Motor Hirose Plant achieving zero defect deliveries over three years. |
| 2019 | Advics Co., Ltd. | Special Award | Awarded in recognition of contributions to BCP (Business Continuity Plan) measures. |
| 2018 | Toyota Motor Corporation | Hirose Plant Excellent Quality Award | Awarded for the brake parts supplied to Toyota Motor Hirose Plant achieving zero defect deliveries throughout the year. |
| 2018 | Advics Co., Ltd. | Quality Excellence Award | Awarded for achieving zero defect deliveries throughout the year. |
| 2017 | Toyota Motor Corporation | Hirose Plant Excellent Quality Award | Awarded for the brake parts supplied to Toyota Motor Hirose Plant achieving zero defect deliveries throughout the year. |
| 2017 | Schaeffler Technologies AG & Co. KG / Continental Automotive GmbH | PREMIUM SUPPLIER NOMINATION 2017 | Acknowledged for outstanding achievements in quality, cost, and delivery performance, and awarded accordingly. |
| 2016 | Toyota Motor Corporation | Hirose Plant Quality Assurance Award | Awarded for actively promoting quality assurance activities during unit start-up, achieving reduction in defects and improvements in quality. |
| 2015 | Continental Automotive GmbH | TOP ASIAN SUPPLIER AWARD 2014 | Awarded as the top supplier in the Asian region for outstanding achievements in quality, cost, and delivery performance. |
| 2015 | Toyota Motor Corporation | Cost Reduction Award | Awarded for actively promoting cost improvement activities and achieving outstanding results. |
| 2015 | Denso Corporation | Excellent Supplier Award – Cost Prize | Awarded for actively promoting cost improvement activities and achieving outstanding results. |
| 2013 | Denso Corporation | Excellent Supplier Award – Cost Prize | Awarded for actively promoting cost improvement activities and achieving outstanding results. |
Company Profile
We are a rare company that produce all metal forming machineries
| Company Name | CITIZEN FINEDEVICE CO.,LTD. |
| Address | [HEAD OFFICE] 6663-2 FUNATSU FUJIKAWAGUCHIKO-MACHI MINAMITSURU-GUN YAMANASHI Zip Code 401-0395 TEL 81-555-23-1231 (main) |
| Founded | July 28,1959 |
| Capital | 1,753,125,000 yen |
| Directors | [President] HIROSHI SHINOHARA [Director] [Audit&Supervisory Board Member] [Operating Officer] |
| Description of Business | Precision Turned Parts, Quartz Crystal Devices, Crystal Wafer, Electronic Devices, Magtets, Thin-film Submount, Ceramic Devices, FA Systems, Measuring Instruments, etc. |
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MEMS manufacturing outsourcing
CITIZEN FINEDEVICE CO.,LTD.
Vendor Information
- Store Name: CITIZEN FINEDEVICE CO.,LTD.
- Vendor: CITIZEN FINEDEVICE CO.,LTD.
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Address:
389-0295
Nagano Kitasaku-gun 4107-5 Oaza Miyota
Miyota-machi
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Electronic Components, Sensor
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Suits a wide range of applications due to ultra-miniaturization.
We have realized displays with the world’s highest level of high-speed responsiveness, high resolution, high definition and high luminance, including mass production of the world’s only “LCOS using a ferroelectric LCD (= FLCOS)”
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Crystals, Electronic Components, Passive Components
Corporate Profile – CITIZEN FINEDEVICE CO.LTD.
We provide a wide variety of products such as small metal parts for automobiles, quartz devices, and ceramic parts to customers in Japan and overseas.
We develop high value-added microdevice products with our high-precision crystal microfabrication technology and proprietary core technologies cultivated in the watch business.
SKU: n/a











